碳纳米管气敏传感器微电极的制备与检测

doi:10.3976/j.issn.1002-4026.2014.01.004

Abstract

Abstract:

We devise a parameter optimization based interdigital microelectrodes (IMEs) structure with reasonable electric field intensity distribution. We manufacture the IMEs of 4 μm minimum gap on ITO surface by lithography. This provides a reliable and lowcost manufacturing method for IMEs preparation. We apply the IMEs in a carbon nanotube gas sensor,and detect gassensing properties for it with ammonia. Results show that the IMEs structure significantly improves the performance of a nanomodified gas sensor.

Key words: lithography, interdigital microelectrodes (IMEs), carbon nanotubes (CNTs), sensor

CLC Number:

TP212.2

RAN Xiang-Chao, WANG Cheng-Xiang, Wang-Zhi. Preparation and detection of the microelectrodes of a carbon nanotube gas sensor[J].J4, 2014, 27(1): 22-26.

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Open Access This article is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License (CC BY-NC 4.0), which permits third parties to freely share (i.e., copy and redistribute the material in any medium or format) and adapt (i.e., remix, transform, or build upon the material) the articles published in this journal, provided that appropriate credit is given, a link to the license is provided, and any changes made are indicated. The material may not be used for commercial purposes. For details of the CC BY-NC 4.0 license, please visit: https://creativecommons.org/licenses/by-nc/4.0

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Preparation and detection of the microelectrodes of a carbon nanotube gas sensor

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