多层金刚石薄膜制备工艺和应力分析研究

doi:10.3976/j.issn.1002-4026.2020.01.009

Shandong Science ›› 2020, Vol. 33 ›› Issue (1): 61-67.doi: 10.3976/j.issn.1002-4026.2020.01.009

• New Materials • Previous Articles Next Articles

Research on the preparation technology and stress analysis of multilayer diamond films

WANG Yi-bao，QIU Hui-min，ZHANG Mei，GUO Feng-xian，WANG Shao-yan， GAI Zhi-gang

National Engineering and Technological Research Center of Marine Monitoring Equipment，Shandong Provincial Key Laboratory of Marine monitoring instrument equipment technology，Institute of Oceanographic Instrumentation，Qilu University of Technology (Shandong Academy of Sciences)，Qingdao 266001，China

Received:2019-09-03 Online:2020-02-20 Published:2020-02-13

Abstract

Abstract: The hot filament chemical vapor deposition method was employed to optimize the preparation process of diamond films. Multilayer diamond films with uniform thickness were successfully prepared by altering their methane concentration, making it possible to prepare diamond films in various modulation cycles. The modulation cycle was as low as 100 nm .A stress analysis of single and multilayer diamond films was conducted using Raman spectroscopy and X-ray diffraction methods. It was found that the stress onmicrodiamond films in the single-layer structure was the highest, and would decrease as the size of diamond grains increased. In the multilayer structure of diamond films, the microlayer and nanolayers alternately grow in a uniform manner, which effectively reduces the stress on the films and improves their stability in applications.

Key words: hot filament chemical vapor deposition, multilayer structure, diamond film, stress analysis

CLC Number:

TB43

WANG Yi-bao, QIU Hui-min, ZHANG Mei, GUO Feng-xian, WANG Shao-yan, GAI Zhi-gang. Research on the preparation technology and stress analysis of multilayer diamond films[J].Shandong Science, 2020, 33(1): 61-67.

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Research on the preparation technology and stress analysis of multilayer diamond films

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