多层金刚石薄膜制备工艺和应力分析研究

Research on the preparation technology and stress analysis of multilayer diamond films

WANG Yi-bao, QIU Hui-min, ZHANG Mei, GUO Feng-xian, WANG Shao-yan, GAI Zhi-gang

Shandong Science . 2020, (1): 61 -67 . DOI: 10.3976/j.issn.1002-4026.2020.01.009