多层金刚石薄膜制备工艺和应力分析研究

doi:10.3976/j.issn.1002-4026.2020.01.009

Abstract

Abstract: The hot filament chemical vapor deposition method was employed to optimize the preparation process of diamond films. Multilayer diamond films with uniform thickness were successfully prepared by altering their methane concentration, making it possible to prepare diamond films in various modulation cycles. The modulation cycle was as low as 100 nm .A stress analysis of single and multilayer diamond films was conducted using Raman spectroscopy and X-ray diffraction methods. It was found that the stress onmicrodiamond films in the single-layer structure was the highest, and would decrease as the size of diamond grains increased. In the multilayer structure of diamond films, the microlayer and nanolayers alternately grow in a uniform manner, which effectively reduces the stress on the films and improves their stability in applications.

Key words: hot filament chemical vapor deposition, multilayer structure, diamond film, stress analysis

CLC Number:

TB43

WANG Yi-bao, QIU Hui-min, ZHANG Mei, GUO Feng-xian, WANG Shao-yan, GAI Zhi-gang. Research on the preparation technology and stress analysis of multilayer diamond films[J].Shandong Science, 2020, 33(1): 61-67.

References 15

1	杨峰. 羰基化纳米金刚石活化过硫酸盐降解对氯苯酚的研究[D]. 哈尔滨: 哈尔滨工业大学, 2017.
2	宋艳鹏. 纳米金刚石/石墨烯复合材料的制备及电极应用[D]. 长春: 吉林大学, 2017.
3	MATSUMOTO S, SATO Y, TSUTSUMI M, et al. Growth of diamond particles from methane-hydrogen gas[J]. Journal of Materials Science, 1982, 17(11): 3106-3112. doi: 10.1007/bf01203472
4	TAKEUCHI S, ODA S, MURAKAWA M. Synthesis of multilayer diamond film and evaluation of its mechanical properties[J]. Thin Solid Films, 2001, 398/399: 238-243. doi: 10.1016/s0040-6090(01)01499-7
5	VOJS M, VESEL M, REDHAMMER R, et al. Double bias HF CVD multilayer diamond films on WC-Co cutting tools[J]. Diamond and Related Materials, 2005, 14(3/4/5/6/7): 613-616. doi: 10.1016/j.diamond.2005.01.006
6	CHEN N C, AI J, CHEN Y C, et al. Multilayer strategy and mechanical grinding for smoothing CVD diamond coated defective substrate[J]. Materials Design, 2016, 103: 194-200. doi: 10.1016/j.matdes.2016.04.069
7	TAKEUCHI S, KOJIMA M, TAKANO S, et al. Adhesion strength of multi-layered diamond films on WC-Co alloy substrate[J]. Thin Solid Films, 2004, 469/470: 190-193.DOI:. doi: 10.1016/j.tsf.2004.08.098
8	LINNIK S A, GAYDAYCHUK A V. Synthesis of multilayer polycrystalline diamond films using bias-induced secondary nucleation[J]. Materials Letters, 2015, 139: 389-392. doi: 10.1016/j.matlet.2014.10.142
9	SALGUEIREDO E, ALMEIDA F A, AMARAL M, et al. A multilayer approach for enhancing the erosive wear resistance of CVD diamond coatings[J]. Wear, 2013, 297(1/2): 1064-1073. DOI:. doi: 10.1016/j.wear.2012.11.051
10	MEI X R, WEI Q P, LONG H Y, et al. Long-term stability of Au nanoparticle-anchored porous boron-doped diamond hybrid electrode for enhanced dopamine detection[J]. Electrochimica Acta, 2018, 271: 84-91. doi: 10.1016/j.electacta.2018.03.133
11	GRUEN D M, LIU S Z, KRAUSS A R, et al. Buckyball microwave plasmas: Fragmentation and diamond-film growth[J]. Journal of Applied Physics, 1994, 75(3): 1758-1763. doi: 10.1063/1.356367
12	HIRAKURI K K, KOBAYASHI T, NAKAMURA E, et al. Influence of the methane concentration on HF-CVD diamond under atmospheric pressure[J]. Vacuum, 2001, 63(3): 449-454. doi: 10.1016/s0042-207x(01)00365-7
13	WIORA M, BR-HNE K, FL-TER A, et al. Grain size dependent mechanical properties of nanocrystalline diamond films grown by hot-filament CVD[J]. Diamond and Related Materials, 2009, 18(5/6/7/8): 927-930. doi: 10.1016/j.diamond.2008.11.026
14	FERRARI A C, ROBERTSON J. Resonant Raman spectroscopy of disordered, amorphous, and diamondlikecarbon[J]. Physical Review B, 2001, 64(7): 075414. doi: 10.1103/physrevb.64.075414
15	MIYAKE S, SHINDO T, SUZUKI M. Nanomechanical and boundary lubrication properties of titanium carbide and diamond-like carbon nanoperiod multilayer and nanocompositefilms[J]. Surface and Coatings Technology, 2013, 221: 124-132. doi: 10.1016/j.surfcoat.2013.01.037

Metrics

Comments

Recommended 0

Open Access This article is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License (CC BY-NC 4.0), which permits third parties to freely share (i.e., copy and redistribute the material in any medium or format) and adapt (i.e., remix, transform, or build upon the material) the articles published in this journal, provided that appropriate credit is given, a link to the license is provided, and any changes made are indicated. The material may not be used for commercial purposes. For details of the CC BY-NC 4.0 license, please visit: https://creativecommons.org/licenses/by-nc/4.0

[1]	WANG Shao-yan, GAI Zhi-gang, WANG Yi-bao, CHAI Xu, LIU Shou-sheng, QIU Hui-min. Electrochemical degradation of methylene blue by boron-doped diamond film electrodes [J]. Shandong Science, 2020, 33(1): 109-115.
[2]	FU Kun1, WANG Gao-qi, WANG Shou-ren, WEN Dao-Sheng, WANG Yong, LIU Wen-tao. Simulation and analysis of mechanical properties of bilayered all-ceramic denture [J]. SHANDONG SCIENCE, 2018, 31(5): 31-37.

Research on the preparation technology and stress analysis of multilayer diamond films

PDF (PC)

Like

Knowledge

Abstract

Cite this article

share this article

References 15

Related Articles 2

Metrics

Comments

Recommended 0