碳纳米管气敏传感器微电极的制备与检测

doi:10.3976/j.issn.1002-4026.2014.01.004

Abstract

Abstract:

We devise a parameter optimization based interdigital microelectrodes (IMEs) structure with reasonable electric field intensity distribution. We manufacture the IMEs of 4 μm minimum gap on ITO surface by lithography. This provides a reliable and lowcost manufacturing method for IMEs preparation. We apply the IMEs in a carbon nanotube gas sensor,and detect gassensing properties for it with ammonia. Results show that the IMEs structure significantly improves the performance of a nanomodified gas sensor.

Key words: lithography, interdigital microelectrodes (IMEs), carbon nanotubes (CNTs), sensor

CLC Number:

TP212.2

RAN Xiang-Chao, WANG Cheng-Xiang, Wang-Zhi. Preparation and detection of the microelectrodes of a carbon nanotube gas sensor[J].J4, 2014, 27(1): 22-26.

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Preparation and detection of the microelectrodes of a carbon nanotube gas sensor

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