J4 ›› 2012, Vol. 25 ›› Issue (6): 1-4.doi: 10.3976/j.issn.1002-4026.2012.06.001

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Sensing characteristics of Pd-Deposited WO3 thin film to hydrogen gas

 JIN Guang-Hu, LI Lei, WANG Yue, HAO Zong-Rui   

  1. Shandong Provincial Key Laboratory of Ocean Environmental Monitoring Technology, Institute
    of Oceanographic Instrumentation, Shandong Academy of Sciences, Qingdao 266001, China
  • Received:2012-09-17 Published:2012-12-20 Online:2012-12-20

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Abstract:

We investigated physicochemical and electrical properties of a Pd-deposited WO3 thin film based hydrogen gas sensor with Pd thickness, annealing temperature and operating temperature as variables. Experimental results show that WO3 exhibits tetragonal polycrystalline  at 500 ℃. The addition of Pd suppresses grain growth of WO3. Pd is an isolated small spherical grain on WO3 thin film at 500 ℃. It agglomerates an irregular large grain or diffuses into WO3 at 600 ℃. A 2 nm Pd-deposited WO3 thin film shows good response and recovery property at 250 ℃.

Key words: gas sensor, semiconductor thin film, Pd catalyst

CLC Number: 

  • O484.4

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