J4 ›› 2011, Vol. 24 ›› Issue (1): 55-60.
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MA Yu-Yang, LIU Ai-Hua, LIU Mei, XU Shi-Cai, HOU Juan, GUO Jin-Jin
Online:
Published:
Abstract:
We made uniform single phase β-FeSi2 films on Si (100) substrate with a Nd:YAG pulsed laser of 1064 nm (output wavelength), pulsed laser deposition (PLD) and thermal annealing process. We further investigated the structure and surface morphology with atomic force microscope (AFM),scanning electron microscope (SEM) and X-ray diffraction (XRD) method. Experimental results show the crystallization degree, size and shape of the grains and surface roughness are all regularly changed with the increase of sputtering time. We discovered that 40 minutes is the optimal sputtering time under the present experimental conditions after comparing the different sputtering time.
Key words: PLD, β-FeSi2 films, sputtering time
CLC Number:
O484.4
MA Yu-Yang, LIU Ai-Hua, LIU Mei, XU Shi-Cai, HOU Juan, GUO Jin-Jin. Effects of sputtering time on the structure and morphology of β-FeSi2 film made with pulsed laser deposition[J].J4, 2011, 24(1): 55-60.
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