飞秒激光热反射法用于纳米薄膜界面热阻研究

doi:10.3976/j.issn.1002-4026.2016.03.007

Abstract

Abstract:

Thermalboundary resistance of nano-film is predominant in thermal transport process of nano-scale structure. Compared with metal nano-film, thermal transport process of nonmetal nano-film is more complicated. We measure thermal boundary resistance between metal, nonmetal nano-film and different dielectric substrates with improveddual-color femosecond laser time-domain thermoreflectance ( TDTR) method. Debye temperature ratio of film and substrate can serve as a measurement of acoustic mismatch degree. For the same Debye temperature ratio, thermal boundary resistance of nonmetal nano-film is about 2 ~3 times greater than that of metal nano-film. This is mainly because electric-phonon coupling enhances thermal transport capability of metal nano-film.

Key words: time-domain thermoreflectance, nano-film, dual-colorfemosecond laser')">dual-colorfemosecond laser, thermal boundary resistance, acoustic mismatch

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LI Feng-ming,LI Xiao-tong,YUAN Kun-peng,WANG Zhao-liang . Application of femtosecond laser TDTR method in thermal boundary resistance of nano-film[J].SHANDONG SCIENCE, 2016, 29(3): 35-39.

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URL: https://www.sdkx.net/EN/10.3976/j.issn.1002-4026.2016.03.007

https://www.sdkx.net/EN/Y2016/V29/I3/35

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Application of femtosecond laser TDTR method in thermal boundary resistance of nano-film

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