J4 ›› 2014, Vol. 27 ›› Issue (1): 22-26.doi: 10.3976/j.issn.1002-4026.2014.01.004

• 海洋科技与装备专栏 • 上一篇    下一篇

碳纳米管气敏传感器微电极的制备与检测

冉祥涛,王成响, 王志   

  1. 山东省科学院海洋仪器仪表研究所,山东 青岛 266001
  • 收稿日期:2013-09-06 出版日期:2014-02-20 发布日期:2014-02-20
  • 作者简介:冉祥涛(1986-),男,硕士,研究方向为海洋仪器仪表。Email:ranxiangtao2007@126.com

Preparation and detection of the microelectrodes of a carbon nanotube gas sensor

 RAN Xiang-Chao, WANG Cheng-Xiang,  Wang-Zhi   

  1. Institute of Oceanographic Instrumentation, Shandong Academy of Sciences, Qingdao 266001, China
  • Received:2013-09-06 Online:2014-02-20 Published:2014-02-20

摘要:

基于参数优化设计了一种电场分布合理的叉指微电极结构,利用光刻技术在ITO表面成功制备了最小指间距约为4 μm的叉指微电极,为微电极制备提供了一种可靠、低成本的制备方法。将这种微电极用于碳纳米管气敏传感器中,并利用氨气对其气敏特性进行测试,结果表明,纳米材料修饰的微电极气敏传感性能得到了明显提高。

关键词: 光刻, 叉指微电极, 碳纳米管, 传感器

Abstract:

We devise a parameter optimization based interdigital microelectrodes (IMEs) structure with reasonable electric field intensity distribution. We manufacture the IMEs of 4 μm minimum gap on ITO surface by lithography. This provides a reliable and lowcost manufacturing method for IMEs preparation. We apply the IMEs in a carbon nanotube gas sensor,and detect gassensing properties for it  with ammonia. Results show that the IMEs structure significantly improves the performance of a nanomodified gas sensor.

Key words: lithography, interdigital microelectrodes (IMEs), carbon nanotubes (CNTs), sensor

中图分类号: 

  • TP212.2