山东科学 ›› 2022, Vol. 35 ›› Issue (2): 70-78.doi: 10.3976/j.issn.1002-4026.2022.02.009

• 光纤与光子传感技术 • 上一篇    下一篇

一种高性能电磁超声传感器线圈背板及其优化设计

陈建伟(),刘帅(),马健,郭锐,宋江峰,白雪,邹龙森,宿一凡   

  1. 齐鲁工业大学(山东省科学院) 山东省科学院激光研究所,山东 济南 250103
  • 收稿日期:2021-03-17 出版日期:2022-04-20 发布日期:2022-04-07
  • 通信作者: 刘帅 E-mail:chjw666666@126.com;ls@sdlaser.cn
  • 作者简介:陈建伟(1987—),男,硕士,助理研究员,研究方向为电磁超声理论。E-mail: chjw666666@126.com
  • 基金资助:
    国家自然科学基金(51805304);山东省重点研发计划(2019GSF111058);山东省重大科技创新工程(2019JZZY010418);山东省自然科学基金(ZR2019PEE014)

High-performance coil backplane for electromagnetic ultrasonic sensor and its optimization design

CHEN Jian-wei(),LIU Shuai(),MA Jian,GUO Rui,SONG Jiang-feng,BAI Xue,ZOU Long-sen,SU Yi-fan   

  1. Laser Institute,Qilu University of Technology(Shandong Academy of Sciences),Jinan 250103,China
  • Received:2021-03-17 Online:2022-04-20 Published:2022-04-07
  • Contact: Shuai LIU E-mail:chjw666666@126.com;ls@sdlaser.cn

摘要:

为提高电磁超声传感器换能效率,对电磁超声横波传感器的线圈背板进行了优化设计。首先通过实验方法研究了线圈背板厚度对超声信号的影响,然后通过有限元仿真软件对采用羰基铁粉作为线圈背板时的磁场分布进行了仿真,最后通过实验比较了线圈背板优化前后横波传感器的信噪比和提离距离。结果表明:电磁超声横波传感器中线圈背板的最佳厚度为1.5~2.0 mm;采用长度和宽度尺寸与线圈工作区域相同的羰基铁粉作为线圈背板能显著增加传感器工作区域的磁场强度;与采用非导磁性材料作为线圈背板相比,采用优化后的羰基铁粉背板可使传感器的信噪比增加约1倍,提离距离增加约1 mm。

关键词: 电磁超声传感器, 偏置磁场, 线圈背板, 羰基铁粉

Abstract:

To improve the energy conversion efficiency of electromagnetic acoustic transducers (EMATs), the coil backplane of the EMAT is optimized. First, the influence of the coil backplane thickness on ultrasonic signals is evaluated via experimental research. Then, the carbonyl iron powder plate is selected as the coil backplane and its influence on the magnetic field of the sensor working area is analyzed via finite element simulation. Finally, the performance of EMATs before and after optimization is compared using experiments. Results show that the optimal thickness of the coil backplane is 1.5~2.0 mm. Moreover, the use of the carbonyl iron powder plate with the same size as the coil working area of the coil backplane can improve the transduction efficiency of EMATs. Compared with the sensors that use nonmagnetic materials as coil backplanes, the SNR of the optimized sensors doubled and the working lift-off distance increased 1 mm, respectively.

Key words: EMATs, bias magnetic field, coil backplane, carbonyl iron powder

中图分类号: 

  • TH878

开放获取 本文遵循知识共享-署名-非商业性4.0国际许可协议(CC BY-NC 4.0),允许第三方对本刊发表的论文自由共享(即在任何媒介以任何形式复制、发行原文)、演绎(即修改、转换或以原文为基础进行创作),必须给出适当的署名,提供指向本文许可协议的链接,同时表明是否对原文作了修改,不得将本文用于商业目的。CC BY-NC 4.0许可协议详情请访问 https://creativecommons.org/licenses/by-nc/4.0