Impact of tube PECVD process on the refracitve index of silicon nitride thin film
REN Xian-Kun, MA Yu-Ying, ZHANG Li-Ming, LIU Peng, JIANG Yan-Sen, XU Zhen-Hua, JIA He-Shun, CHENG Liang, ZHANG Chun-Yan
J4 . 2012, (3): 58 -61 .  DOI: 10.3976/j.issn.1002-4026.2012.03.012

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