多层金刚石薄膜制备工艺和应力分析研究

doi:10.3976/j.issn.1002-4026.2020.01.009

山东科学 ›› 2020, Vol. 33 ›› Issue (1): 61-67.doi: 10.3976/j.issn.1002-4026.2020.01.009

多层金刚石薄膜制备工艺和应力分析研究

王宜豹，邱慧敏，张妹，郭风祥，王韶琰，盖志刚

齐鲁工业大学（山东省科学院）山东省科学院海洋仪器仪表研究所山东省海洋监测仪器装备技术重点实验室国家海洋监测设备工程技术研究中心，山东青岛 266001

收稿日期:2019-09-03 出版日期:2020-02-20 发布日期:2020-02-13
作者简介:王宜豹（1991—），男，助理研究员，研究方向为金刚石薄膜制备及表征。E-mail:m15102916819@163.com
基金资助:
青岛市民生科技计划(17-3-3-73-nsh);山东省自然科学基金（ZR2017BB037）;山东省科学院青年基金（2018QN0040）；山东省科学院科技发展基金（科基合字（2018）第8号）

Research on the preparation technology and stress analysis of multilayer diamond films

WANG Yi-bao，QIU Hui-min，ZHANG Mei，GUO Feng-xian，WANG Shao-yan， GAI Zhi-gang

National Engineering and Technological Research Center of Marine Monitoring Equipment，Shandong Provincial Key Laboratory of Marine monitoring instrument equipment technology，Institute of Oceanographic Instrumentation，Qilu University of Technology (Shandong Academy of Sciences)，Qingdao 266001，China

Received:2019-09-03 Online:2020-02-20 Published:2020-02-13

摘要/Abstract

摘要： 采用热丝化学气相沉积方法，优化金刚石薄膜制备工艺。通过改变甲烷浓度成功制备出厚度均匀的多层金刚石薄膜，实现了多种调制周期的金刚石薄膜制备，调制周期最小至100 nm。通过拉曼光谱和X射线衍射方法对单层以及多层金刚石薄膜进行应力分析，发现单层结构中，微米金刚石薄膜应力最大，随着金刚石晶粒尺寸的减小，薄膜应力减小；多层金刚石薄膜结构中，微米层与纳米层均匀交替生长，有效地降低了薄膜应力，有利于提高金刚石薄膜在应用中的稳定性。

关键词: 热丝化学气相沉积, 多层结构, 金刚石薄膜, 应力分析

Abstract: The hot filament chemical vapor deposition method was employed to optimize the preparation process of diamond films. Multilayer diamond films with uniform thickness were successfully prepared by altering their methane concentration, making it possible to prepare diamond films in various modulation cycles. The modulation cycle was as low as 100 nm .A stress analysis of single and multilayer diamond films was conducted using Raman spectroscopy and X-ray diffraction methods. It was found that the stress onmicrodiamond films in the single-layer structure was the highest, and would decrease as the size of diamond grains increased. In the multilayer structure of diamond films, the microlayer and nanolayers alternately grow in a uniform manner, which effectively reduces the stress on the films and improves their stability in applications.

Key words: hot filament chemical vapor deposition, multilayer structure, diamond film, stress analysis

中图分类号:

TB43

王宜豹, 邱慧敏, 张妹, 郭风祥, 王韶琰, 盖志刚. 多层金刚石薄膜制备工艺和应力分析研究[J]. 山东科学, 2020, 33(1): 61-67.

WANG Yi-bao, QIU Hui-min, ZHANG Mei, GUO Feng-xian, WANG Shao-yan, GAI Zhi-gang. Research on the preparation technology and stress analysis of multilayer diamond films[J]. Shandong Science, 2020, 33(1): 61-67.

参考文献 15

1	杨峰. 羰基化纳米金刚石活化过硫酸盐降解对氯苯酚的研究[D]. 哈尔滨: 哈尔滨工业大学, 2017.
2	宋艳鹏. 纳米金刚石/石墨烯复合材料的制备及电极应用[D]. 长春: 吉林大学, 2017.
3	MATSUMOTO S, SATO Y, TSUTSUMI M, et al. Growth of diamond particles from methane-hydrogen gas[J]. Journal of Materials Science, 1982, 17(11): 3106-3112. doi: 10.1007/bf01203472
4	TAKEUCHI S, ODA S, MURAKAWA M. Synthesis of multilayer diamond film and evaluation of its mechanical properties[J]. Thin Solid Films, 2001, 398/399: 238-243. doi: 10.1016/s0040-6090(01)01499-7
5	VOJS M, VESEL M, REDHAMMER R, et al. Double bias HF CVD multilayer diamond films on WC-Co cutting tools[J]. Diamond and Related Materials, 2005, 14(3/4/5/6/7): 613-616. doi: 10.1016/j.diamond.2005.01.006
6	CHEN N C, AI J, CHEN Y C, et al. Multilayer strategy and mechanical grinding for smoothing CVD diamond coated defective substrate[J]. Materials Design, 2016, 103: 194-200. doi: 10.1016/j.matdes.2016.04.069
7	TAKEUCHI S, KOJIMA M, TAKANO S, et al. Adhesion strength of multi-layered diamond films on WC-Co alloy substrate[J]. Thin Solid Films, 2004, 469/470: 190-193.DOI:. doi: 10.1016/j.tsf.2004.08.098
8	LINNIK S A, GAYDAYCHUK A V. Synthesis of multilayer polycrystalline diamond films using bias-induced secondary nucleation[J]. Materials Letters, 2015, 139: 389-392. doi: 10.1016/j.matlet.2014.10.142
9	SALGUEIREDO E, ALMEIDA F A, AMARAL M, et al. A multilayer approach for enhancing the erosive wear resistance of CVD diamond coatings[J]. Wear, 2013, 297(1/2): 1064-1073. DOI:. doi: 10.1016/j.wear.2012.11.051
10	MEI X R, WEI Q P, LONG H Y, et al. Long-term stability of Au nanoparticle-anchored porous boron-doped diamond hybrid electrode for enhanced dopamine detection[J]. Electrochimica Acta, 2018, 271: 84-91. doi: 10.1016/j.electacta.2018.03.133
11	GRUEN D M, LIU S Z, KRAUSS A R, et al. Buckyball microwave plasmas: Fragmentation and diamond-film growth[J]. Journal of Applied Physics, 1994, 75(3): 1758-1763. doi: 10.1063/1.356367
12	HIRAKURI K K, KOBAYASHI T, NAKAMURA E, et al. Influence of the methane concentration on HF-CVD diamond under atmospheric pressure[J]. Vacuum, 2001, 63(3): 449-454. doi: 10.1016/s0042-207x(01)00365-7
13	WIORA M, BR-HNE K, FL-TER A, et al. Grain size dependent mechanical properties of nanocrystalline diamond films grown by hot-filament CVD[J]. Diamond and Related Materials, 2009, 18(5/6/7/8): 927-930. doi: 10.1016/j.diamond.2008.11.026
14	FERRARI A C, ROBERTSON J. Resonant Raman spectroscopy of disordered, amorphous, and diamondlikecarbon[J]. Physical Review B, 2001, 64(7): 075414. doi: 10.1103/physrevb.64.075414
15	MIYAKE S, SHINDO T, SUZUKI M. Nanomechanical and boundary lubrication properties of titanium carbide and diamond-like carbon nanoperiod multilayer and nanocompositefilms[J]. Surface and Coatings Technology, 2013, 221: 124-132. doi: 10.1016/j.surfcoat.2013.01.037

[1]	王韶琰, 盖志刚, 王宜豹, 柴旭, 刘寿生, 邱慧敏. 掺硼金刚石薄膜电极降解亚甲基蓝废水[J]. 山东科学, 2020, 33(1): 109-115.
[2]	付坤，王高琦，王守仁，温道胜，王勇，刘文涛. 双层全瓷义齿修复体力学性能模拟与分析研究[J]. 山东科学, 2018, 31(5): 31-37.

多层金刚石薄膜制备工艺和应力分析研究

Research on the preparation technology and stress analysis of multilayer diamond films

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 15

相关文章 2

Metrics

本文评价

推荐阅读 0